Morphology of single picosecond pulse subsurface laser-induced modifications of sapphire and subsequent selective etching

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Authors: L. Capuano, R. Pohl, R. M. Tiggelaar, J. W. Berenschot, J. G. E. Gardeniers, G. R. B. E. Römer

Journal title: Optics Express

Journal number: 26/22

Journal publisher: Optical Society of America

Published year: 2018

Published pages: 29283

DOI identifier: 10.1364/oe.26.029283

ISSN: 1094-4087