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Authors: Rainer Kling, Girolamo Mincuzzi, John Lopez, Fotis Fraggelakis, Inka B. Manek-Honninge
Journal title: Laser-based Micro- and Nanoprocessing XII
Journal number: Volume 10520
Journal publisher: SPIE
Published year: 2018
Published pages: 22
DOI identifier: 10.1117/12.2287841
ISBN: 9781-510615267