Optimisation of the RGA location in the evaluation of NEG coating pumping properties

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Authors: Omid Seify, Oleg B. Malyshev, Rūta Širvinskaitė, Reza Valizadeh, AdrianN. Hannah

Journal title: Vacuum

Journal number: 165

Journal publisher: Pergamon Press Ltd.

Published year: 2019

Published pages: 207-214

DOI identifier: 10.1016/j.vacuum.2019.04.006

ISSN: 0042-207X