Atomistic modeling of thermal effects in focused electron beam induced deposition of Me$_2$Au(tfac)

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Authors: Alexey Prosvetov; Alexey V. Verkhovtsev; Gennady Sushko; Andrey V. Solov’yov

Journal title: EPJD

Journal number: 77

Journal publisher: Springer Verlag

Published year: 2023

Published pages: 15

DOI identifier: 10.1140/epjd/s10053-023-00598-5

ISSN: 1434-6060