Far-field sectioning for the retrieval of subwavelength grating parameters using coherent Fourier scatterometry

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Authors: Lauryna Siaudinyte, Silvania F Pereira

Journal title: Measurement Science and Technology

Journal number: 31/10

Journal publisher: Institute of Physics and the Physical Society

Published year: 2020

Published pages: 104005

DOI identifier: 10.1088/1361-6501/ab7315

ISSN: 0957-0233