Wavelength influence on the determination of subwavelength grating parameters by using optical scatterometry

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Authors: Lauryna Siaudinyte, Silvania Pereira

Journal title: Metrology, Inspection, and Process Control for Microlithography XXXIV

Journal publisher: SPIE

Published year: 2020

Published pages: 84

DOI identifier: 10.1117/12.2544156

ISBN: 9781510634183