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Authors: dos Santos Solheid, Juliana; Elkaseer, Ahmed; Wunsch, Torsten; Charles, Amal; Seifert, Hans Jürgen; Pfleging, Wilhelm; Klotzbach, Udo [Hrsg.]; Kling, Rainer [Hrsg.]; Watanabe, Akira [Hrsg.]
Journal title: Laser-based Micro- and Nanoprocessing XIV
Journal number: 11268
Journal publisher: SPIE LASE
Published year: 2020
DOI identifier: 10.5445/ir/1000117583
ISBN: 978-1-5106-3300-1