Automatic feature selection in EUV scatterometry

Summary

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Authors: Paolo Ansuinelli, Wim M. J. Coene, H. P. Urbach

Journal title: Applied Optics

Journal number: 58/22

Journal publisher: OSA

Published year: 2019

Published pages: 5916

DOI identifier: 10.1364/ao.58.005916

ISSN: 1559-128X