High-resolution interference microscopy of binary phase diffractive optical elements

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Authors: Michail Symeonidis, Wataru Nakagawa, Dong Cheon Kim, Andreas Hermerschmidt, Toralf Scharf

Journal title: OSA Continuum

Journal number: 2/9

Journal publisher: OSA

Published year: 2019

Published pages: 2496

DOI identifier: 10.1364/osac.2.002496

ISSN: 2578-7519