Single Femtosecond Laser-Pulse-Induced Superficial Amorphization and Re-Crystallization of Silicon.

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Authors: Camilo Florian; Daniel Fischer; Katharina E. Freiberg; Matthias Duwe; Mario Sahre; Stefan Schneider; Andreas Hertwig; Jörg Krüger; Markus Rettenmayr; Uwe Beck; Andreas Undisz; Jörn Bonse

Journal title: Materials

Journal publisher: MDPI Open Access Publishing

Published year: 2021

DOI identifier: 10.3390/ma14071651

ISSN: 1996-1944