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Authors: Marek Mezera, Camilo Florian, Gert-willem Römer, Jörg Krüger, and Jörn Bonse
Journal title: Ultrafast Laser Nanostructuring
Journal publisher: Springer Nature
Published year: 2023
Published pages: 827-886
DOI identifier: 10.1007/978-3-031-14752-4_23
ISBN: 978-3-031-14751-7