Dual-band fiber-chip grating coupler in a 300 mm silicon-on-insulator platform and 193 nm deep-UV lithography

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Authors: David González-Andrade; Diego Perez-Galacho; Miguel Montesinos-Ballester; Xavier Le Roux; Eric Cassan; Delphine Marris-Morini; Pavel Cheben; Nathalie Vulliet; Stephane Monfray; Frederic Boeuf; Laurent Vivien; Aitor V. Velasco; Carlos Alonso-Ramos

Journal title: Optics letters

Journal number: 129

Journal publisher: Optical Society of America

Published year: 2021

Published pages: 617-620

DOI identifier: 10.1364/ol.414860

ISSN: 0146-9592