Unravelling the effect of fluorinated ligands in hybrid EUV photoresists by X-ray spectroscopy

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Authors: Lianjia Wu, Ivan Bespalov, Katharina Witte, Olivier Lugier, Jarich Haitjema, Michaela Vockenhuber, Yasin Ekinci, Benjamin Watts, Albert M. Brouwer, Sonia Castellanos

Journal title: Journal of Materials Chemistry C

Journal number: 8/42

Journal publisher: Royal Society of Chemistry

Published year: 2020

Published pages: 14757-14765

DOI identifier: 10.1039/d0tc03216f

ISSN: 2050-7534