Summary
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Authors: U.G. Deekshitha, Krithika Upadhya, Albin Antony, Aninamol Ani, M. Nowak, I.V. Kityk, J. Jedryka, P. Poornesh, K.B. Manjunatha, Suresh D. kulkarni
Journal title: Materials Science in Semiconductor Processing
Journal number: 101
Journal publisher: Pergamon Press
Published year: 2019
Published pages: 139-148
DOI identifier: 10.1016/j.mssp.2019.06.001
ISSN: 1369-8001