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Authors: Omar Biondo, ChloƩ Fromentin, Tiago Silva, Vasco Guerra, Gerard van Rooij and Annemie Bogaerts
Journal title: Plasma sources science and technology
Journal number: 31 :7
Journal publisher: Institute of Physics Publishing
Published year: 2022
Published pages: 1-22
DOI identifier: 10.1088/1361-6595/ac8019
ISSN: 0963-0252