A high-efficiency programmable modulatorfor extreme ultraviolet light with nanometrefeature size based on an electronic phasetransition

Summary

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Authors: Igor Vaskivskyi, Anze Mraz, Rok Venturini, Gregor Jecl, Yevhenii Vaskivskyi, Riccardo Mincigrucci, Laura Foglia, Dario De Angelis, Jacopo-Stefano Pelli-Cresi, Ettore Paltanin, Danny Fainozzi, Filippo Bencivenga, Claudio Masciovecchio & Dragan Mihailovic

Journal title: Nature Photonics

Journal publisher: Springer Nature

Published year: 2024

DOI identifier: 10.1038/s41566-024-01389-z

ISSN: 1749-4893