Thickness dependent growth of Ge nanoparticles in amorphous Ge/SiO2 multilayers

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Authors: Pivac, B. ; Dubček, P. ; Zorc, H. ; Bernstorff, S. ; Vlahovic, B. ; Zavašnik, J.

Journal title: Vacuum

Journal publisher: Pergamon Press Ltd.

Published year: 2021

Published pages: 110294

DOI identifier: 10.1016/j.vacuum.2021.110294

ISSN: 0346-251X