In Situ X-ray Diffraction and Spectro-Microscopic Study of ALD Protected Copper Films

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Authors: Gül Dogan, Umut T. Sanli, Kersten Hahn, Lutz Müller, Herbert Gruhn, Christian Silber, Gisela Schütz, Corinne Grévent, Kahraman Keskinbora

Journal title: ACS Applied Materials & Interfaces

Journal number: 12/29

Journal publisher: American Chemical Society

Published year: 2020

Published pages: 33377-33385

DOI identifier: 10.1021/acsami.0c06873

ISSN: 1944-8244