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Authors: Y. Eren Suyolcu, Georg Christiani, Patrick T. Gemperline, Sydney R. Provence, Annette Bussmann-Holder, Ryan B. Comes, Peter A. van Aken, and Gennady Logvenov
Journal title: Journal of Vacuum Science & Technology A
Journal publisher: American Institute of Physics
Published year: 2021
DOI identifier: 10.1116/6.0001473
ISSN: 0734-2101