Progress in atomic layer deposited [alpha]-Ga2O3 materials and solar-blind detectors

Summary

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Authors: Fabien Massabuau; J.W. Roberts; D Nicol; Paul R. Edwards; M McLelland; G L. Dallas; Daniel A. Hunter; E A. Nicolson; John Jarman; András Kovács; Robert W. Martin; Rachel A. Oliver; Paul R. Chalker

Journal title: Oxide-based Materials and Devices XII

Journal number: 32

Journal publisher: Society of Photo-Optical Instrumentation Engineers (SPIE)

Published year: 2021

DOI identifier: 10.1117/12.2588729