Summary
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Authors: Finn Zahari, Felix Schlichting, Julian Strobel, Sven Dirkmann, Julia Cipo, Sven Gauter, Jan Trieschmann, Richard Marquardt, Georg Haberfehlner, Gerald Kothleitner, Lorenz Kienle, Thomas Mussenbrock, Martin Ziegler, Holger Kersten, Hermann Kohlstedt
Journal title: Journal of Vacuum Science & Technology B
Journal number: 37/6
Journal publisher: AVS Science and Technology Society
Published year: 2019
Published pages: 061203
DOI identifier: 10.1116/1.5119984
ISSN: 2166-2754