Improved uniformity and threshold voltage in NbOx-ZrO2 selectors

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Authors: Ao Chen, Yuli He, Guokun Ma, Ziqi Zhang, Jie Ji, Jingshu Wan, Jianqiang Zhang, Houzhao Wan, Li Tao, Yiheng Rao, Liangpin Shen, Hanbin Wang, Jun Zhang, Yi Wang, Ting-Chang Chang, Peter A. van Aken, and Hao Wang

Journal title: Applied Physics Letters

Journal publisher: American Institute of Physics

Published year: 2021

DOI identifier: 10.1063/5.0045257

ISSN: 0003-6951