Online Thickness Determination with Position Averaged Convergent Beam Electron Diffraction using Convolutional Neural Networks

Summary

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Authors: Oberaigner, M.; Clausen, A.; Weber D.; Kothleitner, G.; Dunin-Borkowski, R.E.; Knez, D.

Journal title: Microscopy and Microanalysi

Journal publisher: CAMBRIDGE UNIVERSITY PRESS NEW YORK, NY

Published year: 2023

Published pages: 427-436

DOI identifier: 10.1093/micmic/ozac050

ISSN: 1435-8115