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Authors: Pengfei Cheng, Mario Ziegler, Valentin Ripka, Dong Wang, Hongguang Wang, Peter A.van Aken, Peter Schaaf
Journal title: Applied Materials Today
Journal publisher: Elsevier BV
Published year: 2021
Published pages: 101238
DOI identifier: 10.1016/j.apmt.2021.101238
ISSN: 0020-0255