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Authors: J Cruz, S Hooshmand Zadeh, T Graells, M Andersson, J Malmström, Z G Wu, K Hjort
Journal title: Journal of Micromechanics and Microengineering
Journal number: 27/8
Journal publisher: Institute of Physics Publishing
Published year: 2017
Published pages: 084001
DOI identifier: 10.1088/1361-6439/aa6b14
ISSN: 0960-1317