Si-rich nitride waveguides for the formation of back-end-of-line interfaces with III-V optical sources on silicon

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Authors: Dimitra Ketzaki, Dimitrios Chatzitheocharis, Cosimo Calò, Christophe Caillaud, Alexandre Delga, Konstantinos Vyrsokinos

Journal title: Integrated Optics: Devices, Materials, and Technologies XXIII

Journal publisher: SPIE

Published year: 2019

Published pages: 39

DOI identifier: 10.1117/12.2509261

ISBN: 9781-510624856