MEMS-Enabled Silicon Photonic Integrated Devices and Circuits

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Authors: Niels Quack, Hamed Sattari, Alain Yuji Takabayashi, Yu Zhang, Peter Verheyen, Wim Bogaerts, Pierre Edinger, Carlos Errando-Herranz, Kristinn B. Gylfason

Journal title: IEEE Journal of Quantum Electronics

Journal number: 56/1

Journal publisher: Institute of Electrical and Electronics Engineers

Published year: 2020

Published pages: 1-10

DOI identifier: 10.1109/jqe.2019.2946841

ISSN: 0018-9197