MEMS for Photonic Integrated Circuits

Summary

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Authors: Carlos Errando-Herranz, Alain Yuji Takabayashi, Pierre Edinger, Hamed Sattari, Kristinn B. Gylfason, Niels Quack

Journal title: IEEE Journal of Selected Topics in Quantum Electronics

Journal number: 26/2

Journal publisher: Institute of Electrical and Electronics Engineers

Published year: 2020

Published pages: 1-16

DOI identifier: 10.1109/jstqe.2019.2943384

ISSN: 1077-260X