Reducing Actuation Nonlinearity of MEMS Phase Shifters for Reconfigurable Photonic Circuits

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Authors: Pierre Edinger, Carlos Errando-Herranz, Kristinn B. Gylfason

Journal title: Conference on Lasers and Electro-Optics

Journal publisher: OSA

Published year: 2019

Published pages: SF2H.3

DOI identifier: 10.1364/cleo_si.2019.sf2h.3

ISBN: 978-1-943580-57-6