Laser induced crystallization of sputtered MoS2 thin films

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Authors: Alessandro Tonon, Enrico Di Russo, Francesco Sgarbossa, Luca Bacci, Nicola Argiolas, Carlo Scian, Yurii P. Ivanov, Giorgio Divitini, Brendan Sheehan, Davide De Salvador, Andrea Gasparotto, Vittorio Morandi, Ray Duffy, Enrico Napolitani

Journal title: Materials Science in Semiconductor Processing

Journal number: Volume 164, 2023, 107616,

Journal publisher: Pergamon Press

Published year: 2023

DOI identifier: 10.1016/j.mssp.2023.107616

ISSN: 1369-8001