Synthesis of Large-Area Crystalline MoS2 by Sputter Deposition and Pulsed Laser Annealing

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Authors: Enrico Di Russo* Alessandro Tonon, Arianna Mischianti, Francesco Sgarbossa, Emma Coleman, Farzan Gity, Luca Panarella, Brendan Sheehan, Vasily A. Lebedev, Davide De Salvador, Ray Duffy*, and Enrico Napolitani*

Journal title: ACS Appl. Electron. Mater.

Journal number: 5, 5,

Journal publisher: American Chemical Society

Published year: 2023

Published pages: 2862–2875

DOI identifier: 10.1021/acsaelm.3c00362

ISSN: 2637-6113