Scrutinizing pre- and post-device fabrication properties of atomic layer deposition WS2 thin films

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Authors: Emma Coleman; Scott Monaghan ; Farzan Gity ; Gioele Mirabelli ; Ray Duffy ; Brendan Sheehan ; Shashank Balasubramanyam ;Ageeth A. Bol ; Paul Hurley

Journal title: Appl. Phys. Lett.

Journal number: 123, 011901

Journal publisher: AIP

Published year: 2023

DOI identifier: 10.1063/5.0151592

ISSN: 1077-3118