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Authors: S. Choi , J. Mitard (imec)
Journal title: 2023 7th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)
Journal publisher: IEEE
Published year: 2023
Published pages: pp. 1-3
DOI identifier: 10.1109/edtm55494.2023.10103059
ISBN: 979-8-3503-3252-0