Atomic Layer Deposition of Large-Area Polycrystalline Transition Metal Dichalcogenides from 100 °C through Control of Plasma Chemistry

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Authors: Miika Mattinen, Farzan Gity, Emma Coleman, Joris F. A. Vonk, Marcel A. Verheijen, Ray Duffy, Wilhelmus M. M. Kessels, and Ageeth A. Bol

Journal title: Chemistry of Materials

Journal publisher: American Chemical Society

Published year: 2022

DOI identifier: 10.1021/acs.chemmater.2c01154

ISSN: 0897-4756