Low-Temperature Atomic Layer Deposition of High-k SbOx for Thin Film Transistors

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Authors: Jun Yang, Amin Bahrami, Xingwei Ding, Panpan Zhao, Shiyang He, Sebastian Lehmann, Mikko Laitinen, Jaakko Julin, Mikko Kivekäs, Timo Sajavaara, Kornelius Nielsch

Journal title: Advanced Electronic Materials

Journal number: 8

Journal publisher: Wiley-VCH Verlag

Published year: 2022

Published pages: 2101334

DOI identifier: 10.1002/aelm.202101334

ISSN: 2199-160X