Quantification of area-selective deposition on nanometer-scale patterns using Rutherford backscattering spectrometry

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Authors: Niels Claessens, Zamran Zahoor Khan, Negin Rahnemai Haghighi, Annelies Delabie, André Vantomme, Wilfried Vandervorst and Johan Meersschaut

Journal title: Scientific Reports

Journal number: 12

Journal publisher: Nature Publishing Group

Published year: 2022

Published pages: 17770

DOI identifier: 10.1038/s41598-022-22645-8

ISSN: 2045-2322