Probing the spatial dimensions of nanoscale patterns with Rutherford backscattering spectrometry

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Authors: Niels Claessens, Annelies Delabie, André Vantomme, Wilfried Vandervorst and Johan Meersschaut

Journal title: Nuclear Instruments and Methods B

Journal number: 540

Journal publisher: Elsevier

Published year: 2023

Published pages: 174-181

DOI identifier: 10.1016/j.nimb.2023.04.036

ISSN: 1872-9584