An ion beam spot size monitor based on a nano-machined Si photodiode probed by means of the ion beam induced charge technique

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Authors: G. Andrini, E. Nieto Hernández, G. Provatas, M. Brajkovic, A. Crnjac, S. Ditalia Tchernij, J. Forneris, V. Rigato, M. Campostrini, Z. Siketic, M. Jaksic, E. Vittone

Journal title: Vacuum

Journal publisher: Pergamon Press Ltd.

Published year: 2022

DOI identifier: 10.1016/j.vacuum.2022.111392

ISSN: 0042-207X