Resistivity contrast imaging in semiconductor structures using ultra-low energy scanning electron microscopy

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Authors: Jozwik, I.; Jagielski, J.; Dumiszewska, E.; Kaminski, M.; Kentsch, U.

Journal title: Ultramicroscopy

Journal number: 228

Journal publisher: Elsevier BV

Published year: 2021

Published pages: 113333

DOI identifier: 10.1016/j.ultramic.2021.113333

ISSN: 0304-3991