Depth profiling of Cr-ITO dual-layer sample with secondary ion mass spectrometry using MeV ions in the low energy region

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Authors: Marko, Barac; Marko, Brajković; Zdravko, Siketić; Jernej, Ekar; Iva, Bogdanović Radović; Iva, Šrut Rakić; Janez, Kovač

Journal title: Scientific Reports

Journal number: 3

Journal publisher: Nature Publishing Group

Published year: 2022

DOI identifier: 10.1038/s41598-022-16042-4

ISSN: 2045-2322