Nanoscale multiply charged focused ion beam platform for surface modification, implantation and analysis

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Authors: M. Lalande, P. Salou, A.Houel, C. Bourrin, A. Keiser, J-B. Mellier, A. Sineau, J-M. Ramillon, T. Been, A. Cassimi, A. Delobbe, S. Guillous

Journal title: Rev.Sc.Instrum.

Journal number: 93

Journal publisher: American Institute of Physics

Published year: 2022

Published pages: 043703

DOI identifier: 10.1063/5.0078914

ISSN: 0034-6748