A process modification for CMOS monolithic active pixel sensors for enhanced depletion, timing performance and radiation tolerance

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Authors: W. Snoeys, G. Aglieri Rinella, H. Hillemanns, T. Kugathasan, M. Mager, L. Musa, P. Riedler, F. Reidt, J. Van Hoorne, A. Fenigstein, T. Leitner

Journal title: Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Journal number: 871

Journal publisher: Elsevier BV

Published year: 2017

Published pages: 90-96

DOI identifier: 10.1016/j.nima.2017.07.046

ISSN: 0168-9002