Structural Properties of Al–O Monolayers in SiO 2 on Silicon and the Maximization of Their Negative Fixed Charge Density

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Authors: Daniel Hiller, Jörg Göttlicher, Ralph Steininger, Thomas Huthwelker, Jaakko Julin, Frans Munnik, Michael Wahl, Wolfgang Bock, Ben Schoenaers, Andre Stesmans, Dirk König

Journal title: ACS Applied Materials & Interfaces

Journal number: 10/36

Journal publisher: American Chemical Society

Published year: 2018

Published pages: 30495-30505

DOI identifier: 10.1021/acsami.8b06098

ISSN: 1944-8244