Additive Nano-Lithography with Focused Soft X-rays: Basics, Challenges, and Opportunities

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Authors: Andreas Späth

Journal title: Micromachines

Journal number: 10/12

Journal publisher: Multidisciplinary Digital Publishing Institute (MDPI)

Published year: 2019

Published pages: 834

DOI identifier: 10.3390/mi10120834

ISSN: 2072-666X