The Optical Metrology Laboratory at Diamond: pushing the limits of nano-metrology

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Authors: Ioana-Theodora Nistea, Simon G. Alcock, Murilo Bazan da Silva, Kawal J. S. Sawhney

Journal title: Advances in Metrology for X-Ray and EUV Optics VIII

Journal publisher: SPIE

Published year: 2019

Published pages: 5

DOI identifier: 10.1117/12.2529401

ISBN: 9781-510629127