Wavefront Sensing for Evaluation of Extreme Ultraviolet Microscopy

Summary

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Authors: M. Ruiz-Lopez, M. Mehrjoo, B. Keitel, E. Plönjes, D. Alj, G. Dovillaire, L. Li, and P. Zeitoun

Journal title: Sensors

Journal number: 20

Journal publisher: Multidisciplinary Digital Publishing Institute (MDPI)

Published year: 2020

Published pages: 6426

DOI identifier: 10.3390/s20226426

ISSN: 1424-8220