On the formation and features of the supra-wavelength grooves generated during femtosecond laser surface structuring of silicon

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Authors: E. Allahyari, J. JJ Nivas, E. Skoulas, R. Bruzzese, G.D. Tsibidis, E. Stratakis, S. Amoruso

Journal title: Applied Surface Science

Journal number: 528

Journal publisher: Elsevier BV

Published year: 2020

Published pages: 146607

DOI identifier: 10.1016/j.apsusc.2020.146607

ISSN: 0169-4332