Diffractive shear interferometry for extreme ultraviolet high-resolution lensless imaging

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Authors: G. S. M. Jansen, A. de Beurs, X. Liu, K. S. E. Eikema, S. Witte

Journal title: Optics Express

Journal number: 26/10

Journal publisher: Optical Society of America

Published year: 2018

Published pages: 12479

DOI identifier: 10.1364/oe.26.012479

ISSN: 1094-4087