A stand-alone compact EUV microscope based on gas-puff target source

This is a publication. If there is no link to the publication on this page, you can try the pre-formated search via the search engines listed on this page.

Authors: ALFIO TORRISI, PRZEMYSLAW WACHULAK, ŁUKASZ WĘGRZYŃSKI, TOMASZ FOK, ANDRZEJ BARTNIK, TOMÁŠ PARKMAN, ŠÁRKA VONDROVÁ, JANA TURŇOVÁ, BARTŁOMIEJ J. JANKIEWICZ, BARTOSZ BARTOSEWICZ, HENRYK FIEDOROWICZ

Journal title: Journal of Microscopy

Journal number: 265/2

Journal publisher: Blackwell Publishing Inc.

Published year: 2017

Published pages: 251-260

DOI identifier: 10.1111/jmi.12494

ISSN: 0022-2720