Deep Silicon Amorphization Induced by Femtosecond Laser Pulses up to the Mid‐Infrared

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Authors: Mario Garcia‐Lechuga, Noemi Casquero, Andong Wang, David Grojo, Jan Siegel

Journal title: Advanced Optical Materials

Journal publisher: John Wiley & Sons

Published year: 2021

Published pages: 2100400

DOI identifier: 10.1002/adom.202100400

ISSN: 2195-1071